Features
• High accuracy (standard ±0,5% Rd plus ±0,1% FS)
• Resealable metal-to-metal outer seal construction (no rings)
• Electropolished wetted parts
• Cleanroom assembled
• Multi Gas / Multi Range functionality
• Analog and digital I/O, with optionally integrated interface to DeviceNet™, PROFIBUS DP, Modbus, EtherCAT® or FLOW-BUS
• Super stable zero (no need for auto-zero circuit)
• High accuracy and repeatability
Mass Flow Meter (MFM) | Ranges |
Model F-111CM | min. 0,1 ... 5 mln/min max. 1 ... 50 ln/min |
Mass Flow Controller (MFC) | Ranges |
Model F-201CM | min. 0,2 ... 10 mln/min max. 1 ... 50 ln/min |